Sr. Mechanical Engineer (Vacuum Systems)(E)

Company Overview

Job Description/Preferred Qualifications

Sr Mechanical Engineers are core to KLA's technology, while we do not currently have an opening, we are always building our Sr Mechanical Engineering talent community, we are interested in learning about your background.

Apply to this posting for Future Opportunities with KLA.

Role Summary

KLA is launching its most advanced reticle inspection tool, built on a multizone, ultraclean vacuum (UCV) architecture. As a Senior Vacuum Architect, you will own the endtoend vacuum operation scheme-from architecture and contamination control strategy to pumpdown/vent/transfer sequencing, interlocks, and factory acceptance criteria. You will lead crossfunctional design reviews, translate platform requirements into subsystem specifications, and ensure the vacuum system enables worldclass optical performance, reliability, and highvolume manufacturability. (Aligned to the internal Vacuum System Design Review process and architecture-level responsibilities for a designated Vacuum System Architect.)

Responsibilities

• Lead the mechanical design, integration, and validation of complex, multichamber subsystems, ensuring structural stability, precision performance, and robust contamination control.
• Design and develop ultraclean vacuum system hardware, including chamber structures, interfaces, materials/finishes, seals, and internal components, applying UCV principles such as lowoutgassing materials, precision cleaning requirements, and contaminationminimizing geometries.
• Develop mechanical concepts and detailed designs for chambers, frames, interfaces, mounts, enclosures, and precision mechanisms; create drawings, specifications, and requirements for crossfunctional teams.
• Drive structural, thermal, fluid, and vibrational analyses to optimize component performance and system stability.
• Collaborate closely with optics, metrology, electrical, controls/PLC, software, manufacturing, and service teams to ensure subsystem compatibility and seamless systemlevel integration.
• Support vacuumrelated elements across chambers (e.g., main chamber, stage chamber, transfer chamber, etc.) by defining interfaces, mechanical constraints, and performance requirements that integrate with overall system design.
• Contribute to the development and documentation of vacuum operation schemes (pumpdown, roughing, purge, vent, bake/clean cycles), and partner with Controls/SE on interlocks and sequencing.
• Establish and maintain contaminationcontrol strategies-including materials selection, cleanliness/handling guidelines, and UCVgrade component practices-working with Materials Engineering and Supply Chain to evaluate suppliers.
• Perform firstorder and detailed analyses for pumping configurations, conductance effects, and subsystemlevel performance impacts; collaborate with vacuum specialists as needed for deeper modeling.
• Lead mechanical and systemlevel design reviews (CDR, DDR), ensuring design requirements flow correctly to partner teams (mechanical, electrical, optomechanical, metrology, EFEM/loader, source).
• Own integration of chambers and platform structures for vibration isolation, optical stability, and stage dynamic performance.
• Plan, execute, and oversee test activities-prototype chambers, subsystem test stands, and prefactory builds-including instrumentation, test methods, data analysis, and acceptance metrics.
• Manage risk through FMEA, issue tracking, corrective actions, and designforreliability improvements across NPI and into HVM.
• Mentor engineers, establish best practices (DfX, contamination handling, documentation standards), and maintain engineering artifacts and decision rationale for longterm R&D continuity.

Qualifications

• Education: MS/PhD in Mechanical Engineering or related field (Applied Physics, Materials Science, EE, etc.).
• Experience: 8-12+ years in mechanical design and integration of complex systems (semiconductor equipment, precision instrumentation, multichamber tools, or equivalent). Experience collaborating on vacuum operation schemes and PLCcontrolled interlocks is a plus but not required as a primary role.
• Technical depth: Strong foundation in mechanical engineering-precision design, structural/thermal/vibration analysis, contamination control, materials/finishes, and systemlevel integration. Familiarity with vacuum principles (pumping, conductance, gauging, cleanliness) desired.
• Tools: Proficiency in 3D CAD/PLM workflows; experience with analysis tools (ANSYS/COMSOL or similar); scripting (Python/Matlab) for data processing and modeling; collaboration with PLC/HMI teams.
• Soft skills: Demonstrated crossfunctional leadership, clear technical communication, supplier interaction, issueresolution ownership, and mentoring experience.

NicetoHave

• Exposure to EUVcompatible materials, optical contamination control, or reticle handling/transfer systems.
• * Background with precision metrology, multicolumn imaging systems, or highstability mechanical architectures

Minimum Qualifications

Doctorate (Academic) Degree and related work experience of 3 years; Master's Level Degree and related work experience of 6 years; Bachelor's Level Degree and related work experience of 8 years

Interns are eligible for some of the benefits listed. Our pay ranges are determined by role, level, and location. The range displayed reflects the pay for this position in the primary location identified in this posting. Actual pay depends on several factors, including state minimum pay wage rates, location, job-related skills, experience, and relevant education level or training. We are committed to complying with all applicable federal and state minimum wage requirements where applicable. If applicable, your recruiter can share more about the specific pay range for your preferred location during the hiring process.

KLA is proud to be an Equal Opportunity Employer. We will ensure that qualified individuals with disabilities are provided reasonable accommodation to participate in the job application or interview process, to perform essential job functions, and to receive other benefits and privileges of employment. Please contact us at talent.acquisition@kla.com or at +1-408-352-2808 to request accommodation.

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